MEMS Devices

MEMS devices need highly accurate and repeatable test results with robust mechanical performance.

MEMS are Micro-Electro Mechanical Systems. These ICs exhibit mechanical motion internally. MEMS devices include functions such as micro sensors and micro actuators, which are transducers that convert mechanical signals into electrical signals. Commercial applications of MEMS include accelerometers and gyros used in smart mobile phones and laptop PCs. Mobile phones can employ MEMS for RF oscillators, RF switches, and microphones. MEMS are also used extensively in automobiles, including the engine, air bags, and entertainment systems.

MEMS Package Test Requirements

The level of MEMS testing depends upon the functionality of the MEMS device. For example, some MEMS devices can be tested with traditional IC test handlers, while many others require special test handlers that can supply high G-forces, rotation, and temperature extremes. Here are some of the factors that need to be considered:

Mechanical stability of the package
Clamping mechanism for physical agitation
Vibration/acceleration tolerance
Rotational tolerance
Humidity tolerance
Pressure tolerance
Consistent continuity during physical tests
Consistent force during physical tests
Low capacitance for sensors

Johnstech MEMS Contactor Solution

A MEMS Contactor solution must be a robust test platform. It is subjected to the same rigorous conditions as the MEMS package itself. The Pad ROL™200 MEMS solution utilizes its robust Torlon housing and solid contact technology to meet the stringent robust mechanical and repeatable electrical performance necessary for testing MEMS devices.

Mechanical Stability:

Constant force across all Contacts
Minimal Contact bounce during mechanical vibration and motion
Minimal mechanical movement to prevent stressing the package during mechanical activation
Adjustable manual actuator available to lock-in specific Z height for optimum setting
Resilience to vibration, acceleration and 360 degree X, Y, and Z angular motion
Long contact life and MTBA
Resilience to pressure, vacuum, and humidity
Resilience to temperature variations on mechanical and electrical performance
Compatibility with clamping mechanisms on rotating multi-axis test handlers

Electrical repeatability and stability:

High frequency range (18.5 GHz)
Low inductance (0.55 nH)
High current carrying capacity (3A continuous; 20°C rise)
Low and stable contact resistance ( < 20 milliOhms)

Contact Resistance

Insertion Loss